Fig. 2. (a) Electron density with increasing ICP power in a pure Ar and Ar/C₄F₆ mixture at 10 mTorr. (b) IFEDF with decreasing gap distance in Ar plasma at 10 mTorr. Reproduced with permission from [4], Copyright 2021, American Institute of Physics.

Applied Science and Convergence Technology 2023;32:34~37 https://doi.org/10.5757/ASCT.2023.32.2.34

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