eISSN 2288-6559
Fig. 3.
Fig. 3. (a) A cross-sectional view of the single curling probe and cylindrical plasma. (b) S11 values of the single curling probe with various input electron densities (ne,input) from 5.0×109 to 1.0×1011 cm−3.
Applied Science and Convergence Technology 2023;32:127~133
© Appl. Sci. Converg. Technol.

© The Korean Vacuum Society. All Rights Reserved. / Powered by INFOrang Co., Ltd