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Fig. 3.
Fig. 3. (a) A cross-sectional view of the single curling probe and cylindrical plasma. (b) S11 values of the single curling probe with various input electron densities (ne,input) from 5.0×109 to 1.0×1011 cm−3.
Applied Science and Convergence Technology 2023;32:127~133 https://doi.org/10.5757/ASCT.2023.32.5.127
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