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Fig. 7.
Fig. 7. (a) Cross-sectional view of the parallel double-curling probe with single cylindrical plasma with distance of 1.0 mm from the antenna surface. (b) S11 values of the parallel double-curling probe with various input electron densities (ne,input). The f0 indicates the resonance frequency without plasma and the dashed line indicates the trace of the resonance frequency (fr). (c) The values of fr2f02 2 over the ne,input for four resonance frequencies of 0.87, 1.99, 2.10, and 2.75 GHz. The line graph is the curve fitting for the f0 of 0.87 GHz (gray) and one of 2.75 GHz (magenta). (d) Output electron density (noutput) and difference in the input electron density values for two resonance frequencies of 0.87 and 2.75 GHz. Here, the discrepancy is defined as noutputninput/ninput×100 (%).
Applied Science and Convergence Technology 2023;32:127~133
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