Fig. 8. (a) Cross-sectional view of the parallel double-curling probe with double cylindrical plasmas, which is LDP and HDP, at a distance of 1.0 mm from the antenna surface. The density of HDP (nHPD) is four times that of LPD (nLPD), i.e., nHPD = 4nLPD. (b) and (c) S11 values of the parallel double-curling probe over input electron density for f0 values of 0.87 and 2.75 GHz, respectively. (d) Output electron density (noutput) over the input electron densities (ne,LPD and ne,HPD) for two resonance frequencies of 0.87 and 2.75 GHz.
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