Applied Science and Convergence Technology

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Table 1

Chamber parameter condition

Parameter	Value
Frequency (MHz)	13.56
Quality factor (Qf)	250
Power (W)	100 ~ 180
Pressure (mTorr)	10 ~ 50
O₂ ratio	0.3 ~ 0.7

Applied Science and Convergence Technology 2023;32:122~126 https://doi.org/10.5757/ASCT.2023.32.5.122

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