Fig. 5. (a) O₂ = 0.2, p0 = 60 mTorr, and Pw = 200 W Step 1 comparison. (b) Comparing original data and predicted data in the middle of the chamber.

Applied Science and Convergence Technology 2023;32:122~126 https://doi.org/10.5757/ASCT.2023.32.5.122

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