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Fig. 6. (a) O2 = 0.8, p0 = 60 mTorr, and Pw = 200 W Step 1 comparison. (b) Comparing original data and predicted data in the middle of the chamber.
Applied Science and Convergence Technology 2023;32:122~126 https://doi.org/10.5757/ASCT.2023.32.5.122
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