Fig. 2. (a) Simulated synthetic N₂ spectra for different temperature cases. The instrumental broadening for spectra simulation is 0.084 nm. (b) Comparison of the observed spectra (BLACK) with the synthetic spectra of N₂ (RED) for a 100 W Ar/HMDS plasma with the addition of 0.05 L⋅min⁻¹ N₂.

Applied Science and Convergence Technology 2023;32:114~117 https://doi.org/10.5757/ASCT.2023.32.5.114

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