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Fig. 3. (a) Emission spectrum in the range of 380–900 nm and (b) 300–550 nm of Ar/HMDS/N2 plasma at 100 W with 0.005 L⋅min−1 of N2.
Applied Science and Convergence Technology 2023;32:114~117 https://doi.org/10.5757/ASCT.2023.32.5.114
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