eISSN 2288-6559
Fig. 3.
Fig. 3. (a) Emission spectrum in the range of 380–900 nm and (b) 300–550 nm of Ar/HMDS/N2 plasma at 100 W with 0.005 L⋅min−1 of N2.
Applied Science and Convergence Technology 2023;32:114~117
© Appl. Sci. Converg. Technol.

© The Korean Vacuum Society. All Rights Reserved. / Powered by INFOrang Co., Ltd