ASCT로고
eISSN 2288-6559
Fig. 3.
Fig. 3. Computer-aided design image illustrating the plasma source assembly: (a) head design and (b) head with flexible parts. (c), (d), and (e) show the assembly installed on the chamber from various angles.
Applied Science and Convergence Technology 2024;33:67~71 https://doi.org/10.5757/ASCT.2024.33.3.67
© Appl. Sci. Converg. Technol.

© The Korean Vacuum Society. All Rights Reserved. / Powered by INFOrang Co., Ltd