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Table. 1.

Relation between dose and hole depth.

B con. more than 2.0 × 1021 α=1, σ=200, Rp= Rp Hole = (con. × 2/12) × (60/100) × Hi (x) Hi(x) = a expxRp22σ2
B con. less than 2.0 × 1021 Dose more than 1.0 × 1016 α=1, σ=5, Rp= depth
Dose less than 1.0 × 1016 α=0.01, σ=5, Rp= Rp
Applied Science and Convergence Technology 2024;33:76~79 https://doi.org/10.5757/ASCT.2024.33.3.76
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