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Table. 2.

Hole generation area corresponding to a dose of 1.0 × 1017 cm−2.

Initial energy WO3-TF 35 keV 50 keV 65 keV
40 nm 50–170 nm (120 nm) - -
80 nm 80–170 nm (90 nm) 90–220 nm (130 nm) 130–280 nm (150 nm)
120 nm 120–130 nm (10 nm) 120–210nm (90 nm) 130–270 nm (140 nm)
160 nm - 160 nm 160–240 nm (80 nm)
200 nm - - -
Applied Science and Convergence Technology 2024;33:76~79 https://doi.org/10.5757/ASCT.2024.33.3.76
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