Applied Science and Convergence Technology

Table 2

Hole generation area corresponding to a dose of 1.0 × 10¹⁷ cm⁻².

Initial energy WO₃-TF	35 keV	50 keV	65 keV
40 nm	50–170 nm (120 nm)	-	-
80 nm	80–170 nm (90 nm)	90–220 nm (130 nm)	130–280 nm (150 nm)
120 nm	120–130 nm (10 nm)	120–210nm (90 nm)	130–270 nm (140 nm)
160 nm	-	160 nm	160–240 nm (80 nm)
200 nm	-	-	-

Applied Science and Convergence Technology 2024;33:76~79 https://doi.org/10.5757/ASCT.2024.33.3.76