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Fig. 1. (a) Photographs of heating plate and hot-chuck controller with semiconductor characterization system. (b) Schematic illustration of OTS selector device structure. Deposition methods for each layer are denoted with corresponding color in the schematics. Effective size and thickness of the devices are also represented to calculate the area of contact (A) and the chalcogenide thickness (ua).
Applied Science and Convergence Technology 2024;33:100~103 https://doi.org/10.5757/ASCT.2024.33.4.100
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