Fig. 5. Controlling the ARDE lag. For trenches with width ranging from 2.5 to 10 um under different process conditions: (a) normal ARDE lag (−10 %), (b) elimination of ARDE lag (< 2 %), and (c) inverse ARDE lag (−5 %). Reproduced with permission from [48], Copyright 2019, IOP Publishing.

Applied Science and Convergence Technology 2024;33:108~116 https://doi.org/10.5757/ASCT.2024.33.5.108

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