Applied Science and Convergence Technology 2004; 13(4): 139-144
Published online December 1, 2004
Copyright © The Korean Vacuum Society.
S. S. Hong,J. Y. Lim,Y. H. Shin,K. H. Chung,Ichiro Arakawa
Recently, the importance of clean vacuum and partial pressure measurement of gas species has been increased in the vaccum process. In this study, the partial pressures of H₂, He, C, N, O₂, H₂O, Ar/2, N₂(CO), Ar, CO₂ were measured by residual gas analyzer according to temperature of cryogenic pump which is used to clean vacuum generation and compared. The experimental results showed that the cryopanel temperature was reached to 12 K after 72 minutes of pumping and after 25 hours, the partial pressures in percent were 24.9 %, 6.6 %, 5.5 %, 2.2 %, 3.8 %, 30.7 %, 6.5 %, 6.1 %, 5.5 %, 8.2 % for H₂, He, C, N, O₂, H₂O, Ar/2, N₂, Ar, CO₂ respectively. The dominant gases were H₂ and H₂O, and the partial pressures were relatively high compare to other gases.