Applied Science and Convergence Technology 2006; 15(6): 612-618
Published online November 1, 2006
Copyright © The Korean Vacuum Society.
Jung Hwan Lee,Donghwan Kim,Woon Jung Yeo,Young Gun Han,Jun-Sik Cho,Hyunjoo Kim,Seok Jeun Koh
Surface modification of PTFE by ion irradiation was performed to improve its surface properties. In the case where argon was used to irradiate the PTFE films, an increase in the adhesion strength was observed when the ion fluence was over 5×10¹? ions/㎠, but the surface morphology dramatically changed to a needleshaped one. However, when we used hydrogen ions under O₂ environmental gas, the adhesion strength increased at an ion fluence of 5×10¹? ions/㎠ and the surface morphology by the hydrogen irradiation was not needle shaped. The surface morphology and adhesion strength of the hydrogen modified PTFE was influenced by the oxygen flow rate. It was confirmed by reflectance measurements that the surface properties of the hydrogen ion irradiated PTFE were superior to those of the argon ion irradiated PTFE.
Keywords: PTFE,표면개질,이온빔,수소이온,Surface modification,Ion beam,Hydrogen ion