Applied Science and Convergence Technology 2006; 15(6): 619-623
Published online November 1, 2006
Copyright © The Korean Vacuum Society.
In Chul Park,Hong Bae Kim
The most important factor which determines resonance characteristics of FBAR(Film Bulk Acoustic Resonator) is the piezoelectricity of piezoelectric film. The piezoelectric properties of ZnO thin films which is strong as FBAR piezoelectric film is determined by the degree of c-axis preferred orientation with (002) plan. Therefore, many researchers have been interested in the study on the preferred orientation of the piezoelectric thin film. This paper has studied the preferred orientation of ZnO piezoelectric thin films using the helped seed layer of ZnO. The result shows that the c-axis ZnO thin films with columnar grains that the value of standard deviation(σ) of XRD rocking curve is of σ= 1.15° have the excellent piezoelectric property.
Keywords: 박막체적탄성파공진기,산화아연,보조씨드층,우선배향성,표준편차(σ),FBAR,ZnO,Helped seed layer,Preferred orientation,Standard deviation