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Applied Science and Convergence Technology 2007; 16(2): 91-98

Published online March 1, 2007

Copyright © The Korean Vacuum Society.

Development of a Residual Gas Analyzer Calibration System

S. S. Hong,I. T. Lim,J. T. Kim

Abstract

The Korea Research Institute of Standards and Science (KRISS) has developed a residual gas analyzer (RGA) calibration system and measured gas sensitivities for two different types QMSs using nitrogen, argon, and helium. Different gas sensitivities were identified according to mass and pressure, so it was revealed that the gas sensitivity correction is necessary for proper use of mass spectrometers.

Keywords: 사중극 질량분석기,기체감도,교정,Quadrupole mass spectrometer,gas sensitivity,calibration

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