• Home
  • Sitemap
  • Contact us
Article View

Applied Science and Convergence Technology 2008; 17(5): 448-454

Published online September 1, 2008

Copyright © The Korean Vacuum Society.

A Study on the Piezoelectric Sensor Response Characteristic of PVDF Organic Thin Film by Vapor Deposition Method

Soo Hong Park

Abstract

The purpose of this paper is to discuss the fabrication of β-PVDF(β-Polyvinylidene fluoride, β-PVF₂) organic thin films through the vapor deposition method and to investigate the piezoelectric properties of the organic thin films produced. Vapor deposition was performed under the following conditions : the temperature of evaporator, the applied electric field and the pressure of reaction chamber were 270℃, 142.4 ㎸/㎝ and 2.0×10?? Torr, respectively. The results showed that the amount of β-form PVDF increased from 72 % to 95.5 % with an increase in the substrate temperature. In the case of a sensor response characteristic by varying the force moment from 1.372×10?? Nㆍm to 39.2×10?? Nㆍm, the output voltage increased from 1.39V to 7.04V.

Keywords: β-폴리비닐리덴 플로라이드,유기 박막,힘 모우멘트,출력전압,압전 특성,β-PVDF,Organic thin films,Force moment,Output voltage,Piezoelectric properties

Share this article on :

Stats or metrics

Related articles in ASCT