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Applied Science and Convergence Technology 2011; 20(5): 313-321

Published online September 30, 2011

Copyright © The Korean Vacuum Society.

Development of Uncertainty Evaluation Model for Vacuum Measurement Standards

S. S. Hong,J. Y. Lim,Y. H. Shin


The Korea Research Institute of Standards and Science (KRISS) has three major vacuum systems: an ultrasonic interferometer manometer (UIM), a static volume expansion system (SVES), and an orifice-type dynamic expansion system (ODES). For each system explict measurement model equations with multiple variables are respectively given. According to ISO standards, all these system variables errors were used to calculate the expanded uncertainty (U).

Keywords: 진공측정표준,초음파간섭 수은주압력계,정적형표준기,정압형표준기,불확도,Vacuum measurement standards,Ultrasonic interferometer manometer,Static volume expansion system,Dynamic expansion system,Uncertainty

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