Applied Science and Convergence Technology
Published online August 29, 2023
Copyright © The Korean Vacuum Society.
Chan-Won Park 1 , 2 , Hee-Jung Yeom 1 , Hyo-Chang Lee 3 , 4* , Jung-Hyung KIM 1*
1Korea Research Institute of Standards and Science, 2Department of Physics, Chungnam National University, 3School of Electronics and Information Engineering, Korea Aerospace University, 4Department of Semiconductor Science, Engineering and Technology, Korea Aerospace University
As a radio-frequency (RF) power and plasma process monitoring sensor, the voltage-current (VI) probe has been utilized and developed to monitor and optimize the plasma processes in the semiconductor fabrication. However, there are many components to deliver the RF power from power supply to the plasma electrodes such as RF connector and RF cable which affect to the RF power transmission efficiency, it is necessary to analyze the characteristics of RF power transmission lines using the VI probe with respect to external parameter configuration. In this study, we investigated the characteristics of the RF signals using the VI probe under various RF power transmission lines, including the VI probe installation position, RF connector type, and RF cable length. The RF signals were measured as a function of input power in a low-pressure argon discharge. As a result, RF power loss was significant when long-length RF cables were used for the transmission line. Analyzed characteristic of the RF transmission lines using the VI probe is able to contribute to increasing the measurement reliability of RF measurement properties for the plasma processing applications.
Keywords: Voltage current probe, RF power transmission line