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Applied Science and Convergence Technology

Published online July 1, 2024

Copyright © The Korean Vacuum Society.

Computational study of antenna electrical conductivity on the transmission spectra of the flat cutoff sensor

Gwang-Seok Chae 1 , 2 , Hee-Jung Yeom 2 , Jung-Hyung Kim 2* , Hyo-Chang Lee 1 , 3*

1Department of Semiconductor Science, Engineering and Technology, Korea Aerospace University, Goyang 10540, Republic of Korea, 2Korea Research Institute of Standards and Science, Daejeon 34113, Republic of Korea, 3School of Electronics and Information Engineering, Korea Aerospace University, Goyang 10540, Republic of Korea

Correspondence to:jhkim86@kriss.re.kr, plasma@kau.ac.kr

Received: May 10, 2024; Revised: June 24, 2024; Accepted: July 1, 2024

Abstract

As the importance of process analysis based on plasma parameter measurement increases, there is a growing interest in non-invasive plasma diagnostic methods. The flat cutoff sensor is known to enable non-invasive, non-perturbative real-time measurement of plasma parameters. However, no studies have been performed on the transmission spectrum and electron density measurement by altering the material of the components of the flat cutoff sensor. In this study, we analyzed the transmission spectrum and electron density measurement characteristics of a flat cutoff sensor by changing the antenna’s electrical conductivity in simulation. The antenna’s electrical conductivity varied from 0.1 to 1×10^6 S/m, the cutoff frequency according to electrical conductivity was the same as the input plasma frequency, and the intensity of the minimum transmission spectrum decreased from -106 to -206 dB as the antenna’s electrical conductivity decreased from 1×10^6 to 0.1 S/m. We verified the measurement characteristics by examining how the intensity of the minimum transmission spectrum varied with the antenna's conductivity, using electric field profiles and strengths. These results can help determine materials for the components of the flat cutoff sensor.

Keywords: Plasma diagnostic, Flat cutoff sensor, Transmission spectrum, Electrical conductivity, Non-invasive

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