Applied Science and Convergence Technology 2014; 23(5): 240-247
Published online September 30, 2014
Copyright © The Korean Vacuum Society.
Department of Mechanical Engineering, Hanbat National University
Correspondence to:Jinnil Choi*
Modelling and measurements of normal and lateral stiffness for atomic force microscopy
(AFM) are presented in this work. Important issues, such as element discretisation, stiffness
calibration, and deflection angle are explored using the finite element (FE) model. Elements
with various dimension ratios are investigated and comparisons with several mathematical
models are reported to verify the accuracy of the model. Investigation of the deflection angle
of a cantilever is also shown. Moreover, AFM force measurement experiments with conical
and colloid probe tips are demonstrated. The relationships between force and displacement,
required for stiffness measurement, in normal and lateral directions are acquired for the conical
tip and the limitations of the colloid probe tip are highlighted.
Keywords: AFM, Finite element modelling, Stiffness, Colloid probe, Friction modelling