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Research Paper

Applied Science and Convergence Technology 2015; 24(5): 162-166

Published online September 30, 2015

https://doi.org/10.5757/ASCT.2015.24.5.162

Copyright © The Korean Vacuum Society.

Linear Ion Beam Applications for Roll-to-Roll Metal Thin Film Coatings on PET Substrates

Seunghun Lee and Do-Geun Kim*

Plasma Processing Laboratory, Division of Surface Technology, Korea Institute of Materials Science, Changwon 51508, Korea

Correspondence to:Do-Geun Kim
dogeunkim@kims.re.kr

Received: September 10, 2015; Revised: September 23, 2015; Accepted: September 24, 2015

This is an Open Access article distributed under the terms of the Creative Commons Attribution Non-Commercial License (http://creativecommons.org/licenses/by-nc/3.0) which permits unrestricted non-commercial use, distribution, and reproduction in any medium, provided the original work is properly cited.

Abstract

Linear ion beams have been introduced for the ion beam treatments of flexible substrates in roll-to-roll web coating systems. Anode layer linear ion sources (300 mm width) were used to make the linear ion beams. Oxygen ion beams having an ion energy from 200 eV to 800 eV used for the adhesion improvement of Cu thin films on PET substrates. The Cu thin films deposited by a conventional magnetron sputtering on the oxygen ion beam treated PET substrates showed Class 5 adhesion defined by ASTM D3359-97 (tape test). Argon ion beams with 1∼3 keV used for the ion beam sputtering deposition process, which aims to control the initial layer before the magnetron sputtering deposition. When the discharge power of the linear ion source is 1.2 kW, static deposition rate of Cu and Ni were 7.4 and 3.5 Å/sec, respectively.

Keywords: Ion beam, Ion source, Sputtering, Surface treatment, Roll-to-roll

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