Applied Science and Convergence Technology 1993; 2(3): 314-318
Published online September 1, 1993
Copyright © The Korean Vacuum Society.
Y. H. Shin,S. S. Hong,K. H. Chung
Quadrupole mass spectrometer is a widely used instrument for partial pressure measurement and residual gas analysis. Sensitivities of QMS has been investigated over the pressure range of 10^(-4)~10^(-8)torr for CO, H₂ Ar and their mixed gases. The dependence of the signal developed from a constant partial pressure trace gas as a function of the pressure of matrix gas was studied. The results demonstrated that sensitivities 6f CO, H₂ were greatly influenced by matrix gas species and pressure. Thus for all the quantitive applications, it is necessary to characterize quadrupole mass spectrometer carefully.