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Applied Science and Convergence Technology 1993; 2(3): 331-334

Published online September 1, 1993

Copyright © The Korean Vacuum Society.

Fabrication and Applications of Comb - Shaped Lateral Field Emitter Arrays

Junji Itoh

Abstract

Various FEAs with lateral and vertical structures have been investigated. Lateral FEA has a coplanar configuration of the emitter and the gate is more suitable for high frequency device application. The structure and emission characteristics and applications of a comb-shaped lateral FEA are explained.

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