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Applied Science and Convergence Technology 1997; 6(3): 187-193

Published online August 1, 1997

Copyright © The Korean Vacuum Society.

Study on the Cu / polyimide interface using XPS : Initial growth of Cu sputter - deposited on the polyimide at room temperature (I)

Youn-Seoung Lee,Chung Nam Whang

Abstract

We investigated the initial growth mode of Cu deposited on polyimide at room temperature using x-ray photoelectron spectroscopy. We could find that when Cu is sputter-deposited on the polyimide, Cu-N-O complex of strong interaction is mainly formed first, Cu-oxide of weak interaction is formed successively, and then finally metallic Cu grows. From these results, we could conclude that Cu/polyimide interface consists of Cu-N-O complex and Cu-oxide.

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