Applied Science and Convergence Technology 1997; 6(3): 187-193
Published online August 1, 1997
Copyright © The Korean Vacuum Society.
Youn-Seoung Lee,Chung Nam Whang
We investigated the initial growth mode of Cu deposited on polyimide at room temperature using x-ray photoelectron spectroscopy. We could find that when Cu is sputter-deposited on the polyimide, Cu-N-O complex of strong interaction is mainly formed first, Cu-oxide of weak interaction is formed successively, and then finally metallic Cu grows. From these results, we could conclude that Cu/polyimide interface consists of Cu-N-O complex and Cu-oxide.