Applied Science and Convergence Technology 2000; 9(4): 360-366
Published online December 1, 2000
Copyright © The Korean Vacuum Society.
Joo Dong Park,Ji Woong Kim,Tae Sung Oh
Sr_xBi_(2.4)Ta₂O_9 (SBT) thin films of 150 ㎚ thickness were prepared using LSMCD (Liquid Source Misted Chemical Deposition) process with variation of the Sr/Ta mole ratio of 0.35~0.65, and their crystalline phase, microstructure, ferroelectric properties and leakage current characteristics were investigated. Ferroelectric characteristics of the LSMCD-derived SBT films were optimized at the Sr/Ta mole ratio of 0.425. The remanent polarization (2Pr) and coercive field (Ec) of the SBT film with the Sr/Ta mole ratio of 0.425 were measured as 15.01 μC/㎠ and 41 ㎸/㎝ at an applied voltage of ±5 V, respectively. LSMCD-derived SBT films with the Sr/Ta mole ratio of 0.35~0.5 exhibited leakage current densities lower than 10^(-5) A/㎠ at an applied field of 100 ㎸/㎝ and excellent fatigue-free characteristics of the remanent polarization decrement less than I % after 10^(10) switching cycles at ±5 V.