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Applied Science and Convergence Technology 2001; 10(4): 424-430

Published online December 1, 2001

Copyright © The Korean Vacuum Society.

Determination of electron energy distribution functions in radio - frequency (RF) and microwave discharges

Wook Hee Koh,In Ho Park,Nam Choon Kim

Abstract

An electron Boltzmann equation is solved numerically to calculate the electron energy distribution functions in plasma discharge which is generated by radio-frequency (RF) and microwave frequency electric field. The maintenance field strengths are determined self-consistently by solving the homogeneous electron Boltzmann equation in the Lorentz approximation expressed by 2nd order differential equation and an additional particle balance equation expressed by integro-differential equation. By using this numerical code, the electron energy distribution functions in argon discharge are calculated in the range from RF to microwave frequency. The influence of frequency of the HF electric field on the electron energy distribution functions and ionization rate are investigated.

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