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Applied Science and Convergence Technology 2009; 18(3): 176-185

Published online May 1, 2009

Copyright © The Korean Vacuum Society.

Design of an Inductively Coupled Plasma Source with Consideration of Electrical Properties and its Practical Issues

S. W. Lee

Abstract

The realization and the performance of ICP source are strongly affected by its electrical impedance and the electric/magnetic field distribution. The ICP source impedance is determined by the antenna impedance and the plasma one. It is preferred to keep the imaginary impedance between -100 ohm to 100 ohm, since it should be avoided the high voltage formation on the antenna and abrupt impedance variation during the thin film process. The plasma uniformity is affected by the electric and magnetic field which is formed by the antenna current and voltage. The influence of azimuthal symmetry are shown by the electromagnetic simulation and the measurement result of plasma density. The radial uniformity can be controlled by locating the concentric antennas which have different diameters. The power distribution ratio and its control method are presented in the case of parallel antenna connections.

Keywords: 플라즈마,ICP source,Impedance,Uniformity,Plasma

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