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Applied Science and Convergence Technology 2012; 21(5): 233-241

Published online September 1, 2012

Copyright © The Korean Vacuum Society.

Study on Effect of Various Underlayer on Bilayer Agglomerlation

J. H. Ha , D. H. Ryu , H. W. Im , J. M. Jung , H. J. Choi , I. G. Hong , J. H. Koh , S. M. Koo , M. Kamiko , J. G. Ha

Abstract

We have deposited the bilayer consisted of the underlayer and the overlayer by using DC magnetron sputter on Single crystal MgO (001) substrate. This bilayer was fabricated at fixed annealing temperature and time. We have controlled agglomeration effect by changing of the bilayer thickness. Finally, we have made the self-organization and nano-structured film. In this processing, we have made nano-dot which consists of the underlayer and the overlayer, unlike the existing method called the agglomeration effect in the single layer. The underlayer has deposited using Ti, Cr and Co. And the overlayer has deposited with Ag. Through the analysis of Atomic force microscopy (AFM), the microstructure of underlayer is observed by AFM to confirm the formation of nano-dot. As the nano-dot through above processing, we have found that the nano-dot has the different shape. As a result, when we manufactured nano-dot through the agglomeration effect of bi-layer, the best matching material is Ti for underlayer. And also, we have found that MgO/Ti/Ag samples have been grown expitaxially toward the direction of MgO (001) by X-ray Diffraction analysis.

Keywords: 자기조립화,응집현상,나노 점,이중층,Self-organization,Agglomeration,Nano-dot,Bilayer

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