Applied Science and Convergence Technology 2013; 22(3): 111-118
Published online May 1, 2013
Copyright © The Korean Vacuum Society.
Won Young Lee , Dong Jun Jin , Yun Jung Kim , Gook Hee Han , Hong Keun Yu , Hyun Chul Kim , Se Whan Jin , Je Huan Koo , Do Young Kim , Guangsup Cho
The influence of gas flow on the plasma generation in the atmospheric plasma jet is described with the theory of hydrodynamics. The plasma discharge is affected by the gas-flow streams with Reynolds number (Re) as well as the gas pressure with Bernoulli"s theorem according to the gas flow rate inserted into the glass tube. The length of plasma column is varied with the flow types such as the laminar flow of Re＜2,000 and the turbulent flow of Re＞4,000 as it has been known in a general fluid experiments. In the laminar flow, the plasma column length is increased as the increase of flow rate. Since the pressure in the glass tube becomes low as the increase of flow velocity by the Bernoulli"s theorem, the breakdown voltage of plasma discharge is reduced by the Paschen"s law. Therefore, the plasma length is increased as the increasing flow rate with the fixed operation voltage. In the transition of laminar and turbulent flows, the plasma length is decreased. When the flow becomes turbulent as the flow rate is increasing, the plasma length becomes short and the discharge is shut down ultimately. In the discharge of laminar flow, the diameter of plasma beam exposed on the substrate surface is kept less than the glass diameter, since the gas flow is kept to the distinct distance from the nozzle of glass tube.
Keywords: 대기압 플라즈마 제트,유량,레이놀즈 수,층류,난류,베르누이 정리,Atmospheric plasma jet,Flow rate,Reynolds number,Laminar flow,Turbulentflow,Bernoulli's theorem