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Research Paper

Applied Science and Convergence Technology 2017; 26(6): 195-200

Published online November 30, 2017

https://doi.org/10.5757/ASCT.2017.26.6.195

Copyright © The Korean Vacuum Society.

Development of a Plasma Training Lab kart: System Setup and Numerical Simulation

Junghoon Joo

Department of Materials Science and Engineering, Kunsan National University, Gunsan, Jeonbuk 573-701, Korea

Correspondence to:E-mail: jhjoo@kunsan.ac.kr

Received: October 22, 2017; Revised: November 26, 2017; Accepted: November 28, 2017

This is an Open Access article distributed under the terms of the Creative Commons Attribution Non-Commercial License (http://creativecommons.org/licenses/by-nc/4.0) which permits unrestricted non-commercial use, distribution, and reproduction in any medium, provided the original work is properly cited.

Abstract

A mobile lab kart for plasma training is developed with a high vacuum pumping system, vacuum gauges and a glass discharge tube powered by a high voltage transformer connected to a household 60 Hz line. A numerical model is developed by using a commercial multiphysics software package, CFD-ACE+ to analyze the experimental data. Simulations for argon and nitrogen were carried out to provide fundamental discharge characteristics. Variations of the kart configuration were demonstrated: a glass tube with three electric probes, optical emission spectrometer attachment and infra red thermal imaging system to give more detailed analysis of the discharge characteristics.

Keywords: Plasma, Geissler tube, CCP, Numerical simulation

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