Applied Science and Convergence Technology 2017; 26(6): 195-200
Published online November 30, 2017
https://doi.org/10.5757/ASCT.2017.26.6.195
© The Korean Vacuum Society.
Junghoon Joo
Department of Materials Science and Engineering, Kunsan National University, Gunsan, Jeonbuk 573-701, Korea
Correspondence to:E-mail: jhjoo@kunsan.ac.kr
This is an Open Access article distributed under the terms of the Creative Commons Attribution Non-Commercial License (http://creativecommons.org/licenses/by-nc/4.0) which permits unrestricted non-commercial use, distribution, and reproduction in any medium, provided the original work is properly cited.
A mobile lab kart for plasma training is developed with a high vacuum pumping system, vacuum gauges and a glass discharge tube powered by a high voltage transformer connected to a household 60 Hz line. A numerical model is developed by using a commercial multiphysics software package, CFD-ACE+ to analyze the experimental data. Simulations for argon and nitrogen were carried out to provide fundamental discharge characteristics. Variations of the kart configuration were demonstrated: a glass tube with three electric probes, optical emission spectrometer attachment and infra red thermal imaging system to give more detailed analysis of the discharge characteristics.
Keywords: Plasma, Geissler tube, CCP, Numerical simulation