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Research Paper

Applied Science and Convergence Technology 2018; 27(6): 149-152

Published online November 30, 2018


Copyright © The Korean Vacuum Society.

Preparation of MoS2 Nanopetals by RF Magnetron Sputtering and Electron-Beam Irradiation

Bong Ho Kim , Jin Hee Han , Soon Hyeong Kwon , and Young Joon Yoon*

Nano-Convergence Materials Center, Korea Institute of Ceramic Engineering and Technology (KICET), Gyeongsangnam-do 52851, Republic of Korea

Correspondence to:*Corresponding author: E-mail: yjyoon@kicet.re.kr

Received: October 19, 2018; Accepted: November 13, 2018


We demonstrate the preparation of molybdenum disulfide (MoS2) nanopetals by RF magnetron sputtering and electron-beam irradiation (EBI). To investigate the structure and the surface morphology of MoS2 films, atomic force microscopy (AFM), Raman spectroscopy, and scanning electron microscopy (SEM) were carried out. AFM results reveal that the surface roughness of MoS2 increases with increase in deposition. After EBI process, the surface roughness decreases except for MoS2 deposited for 5 min. In addition, EBI process increases the crystallinity of MoS2 films, which is confirmed by Raman spectroscopy. The increase of crystallinity and the change of surface morphology are induced by inelastic scattering, which is the interaction between incident electrons and target material. SEM images display nanopetal structure of EBI-treated MoS2 and we expect EBI-treated MoS2 to be a potential candidate for applications such as gas sensors and hydrogen evolution reactions due to its vertically exposed edge sites.

Keywords: 2D material, Molybdenum disulfide, Nanopetal, Electron beam irradiation, Sputtering

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