Synthesis of Transition Metal Disulfides with Liquid Ammonium Sulfide as a Reliable Sulfur Precursor

Soo Ho Choi; Chang Seok Oh; Stephen Boandoh; Woochul Yang; Soo Min Kim; Ki Kang Kim

doi:10.5757/ASCT.2019.28.3.60

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Applied Science and Convergence Technology 2019; 28(3): 60-65

Published online May 31, 2019

https://doi.org/10.5757/ASCT.2019.28.3.60

Synthesis of Transition Metal Disulfides with Liquid Ammonium Sulfide as a Reliable Sulfur Precursor

Soo Ho Choi^a , Chang Seok Oh^b , Stephen Boandoh^b , Woochul Yang^a , Soo Min Kim^c , and Ki Kang Kim^{b , *}

^aDepartment of Physics, Dongguk University, Seoul 04620, Republic of Korea, ^bDepartment of Energy and Materials Engineering, Dongguk University, Seoul 04620, Republic of Korea, ^cInstitute of Advanced Composite Materials, Korea Institute of Science and Technology (KIST), Jeonbuk 55324, Republic of Korea

Correspondence to:^*E-mail: kkkim@dongguk.edu

Received: May 22, 2019; Accepted: May 29, 2019

This is an Open Access article distributed under the terms of the Creative Commons Attribution Non-CommercialLicense (http://creativecommons.org/licenses/by-nc/3.0) which permits unrestricted non-commercial use, distribution,and reproduction in any medium, provided the original work is properly cited.

Abstract

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Abstract

We introduce liquid ammonium sulfide as a reliable and carbon-free sulfur precursor for synthesizing large-area transition metal disulfides (TMdS) in chemical vapor deposition. The flux of sulfur during TMdS growth is precisely controlled by passing a known amount of carrier gas through a bubbling system containing liquid ammonium sulfide. However, controlling the flux of sulfur through the conventional evaporation of sulfur powder using a heating belt remains a challenge. By achieving controllability of sulfur flux, we study growth kinetics such as nucleation density and growth rate. Furthermore, the continuous supply of the sulfur precursor results in the growth of a large-area monolayer and a few layers of MoS₂ film. In addition, we present the feasibility of ammonium sulfide as an effective and clean precursor for the growth of a wide range of TMdS, thus enabling it to serve as a universal sulfur precursor.

Keywords: Two-dimensional materials, Transition metal dichalcogenides, Chemical vapor deposition, Precursor, Ammonium sulfide