Applied Science and Convergence Technology 2020; 29(1): 5-9
Published online January 31, 2020
https://doi.org/10.5757/ASCT.2020.29.1.005
Copyright © The Korean Vacuum Society.
Jun-Hyoung Park* , Heechol Choi , Won-Seok Chang , Sang Young Chung , Deuk-Chul Kwon , Mi-Young Song , and Jung-Sik Yoon
Plasma Technology Research Center, National Fusion Research Institute, Gunsan 54004, Republic of Korea
Correspondence to:pjh1126@nfri.re.kr
This is an Open Access article distributed under the terms of the Creative Commons Attribution Non-CommercialLicense (http://creativecommons.org/licenses/by-nc/3.0) which permits unrestricted non-commercial use, distribution,and reproduction in any medium, provided the original work is properly cited.
Bulk and surface chemistry database (DB) are necessary to compute plasma parameters using plasma simulators. As the high quality of the DB is closely related to the accuracy enhancement of simulations, we attempted to gather reliable data from previously published articles. However, previous systems could not accommodate various types of information such as electron collision cross sections, rate coefficients of heavy particle reactions, sticking coefficients on the surfaces, and thermodynamic data. Therefore, we developed a new version of the DB system to provide plasma data for researchers in related fields; this new DB system is designed to retrieve data such as electron collision cross sections, rate coefficient, and thermodynamics data. About 35,000 collision cross sections and 74,000 rate coefficients for 90 chemical species and thermodynamic data for 55 chemicals are provided in the numerical and graphical forms in this DB system.
Keywords: Atomic and molecular data, Plasma database, Plasma chemistry, Plasma properties