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Research Paper

Applied Science and Convergence Technology 2021; 30(1): 34-37

Published online January 30, 2021


Copyright © The Korean Vacuum Society.

Structure and Photoluminescence of Optically Transparent Y2O3:Eu Thin Films Prepared on Sapphire Substrates by RF Magnetron Sputtering

Jin Yeong Jeong and Joo Han Kim*

Department of Advanced Materials Engineering, Chungbuk National University, Cheongju 28644, Republic of Korea

Correspondence to:joohan@cbnu.ac.kr

Received: January 6, 2021; Revised: January 27, 2021; Accepted: January 29, 2021


The Y2O3:Eu films were prepared on sapphire substrates by radio frequency magnetron sputtering. The samples were post-annealed in an air ambient at different temperatures. The Y2O3:Eu films prior to annealing did not show photoluminescence (PL), however, after annealing, the films became capable of emitting photoluminescent light. The PL spectra were composed of several peaks originating from the transitions between 4f energy levels of the Eu3+ ion, from 5D0 to 7FJ where J = 0, 1, 2 ,3, and 4. The PL intensity increased upon annealing at higher temperatures, which was due to the higher degree of crystallinity. The PL intensity decreased above 1200 °C resulting from the formation of yttrium aluminate phases, such as YAM (Y4Al2O9), YAP (YAlO3), and YAG (Y3Al5O12). The unannealed Y2O3:Eu films exhibited a high optical transmittance in the visible to lms decreased as annealing temperature increased due to increase in crystallite sizes.

Keywords: Radio frequency magnetron sputtering, Thin films, Sapphire, Annealing, X-ray diffraction

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