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Research Paper

Applied Science and Convergence Technology 2021; 30(2): 50-53

Published online March 30, 2021

https://doi.org/10.5757/ASCT.2021.30.2.50

Copyright © The Korean Vacuum Society.

A Quantification Method in Quadrupole Mass Spectrometer Measurement

Young Seok Leea , Sang Hyeop Ohc , Jang Jae Leea , Chul Hee Choa , Si Jun Kimd , and Shin Jae Youa , b , ∗

aDepartment of Physics, Chungnam National University, Daejeon 34134, Republic of Korea
bInstitute of Quantum Systems (IQS), Chungnam National University, Daejeon 34134, Republic of Korea
cKorea Research Institute of Standards and Science, Daejeon 34113, Republic of Korea
dNanotech Optoelectronics Research Center, Yongin 16882, Republic of Korea

Correspondence to:E-mail: sjyou@cnu.ac.kr

Received: February 10, 2021; Accepted: March 3, 2021

Abstract

Quadrupole mass spectrometry (QMS) has been widely used in the semiconductor industry to monitor plasma radical or ion species, but the signal used in QMS is mostly not quantified. To quantify QMS signals to radical density measurements, the signals should be calibrated by a reference. During this calibrating process, it is important to apply a proper signal proportional coefficient between the signal of QMS and the particle density of the plasma, which is known to be strongly related to the mass of the particle, but is not precisely well known one until now. In this work, we propose a simple approach to obtain reliable signal proportional coefficients of different masses by using with standard gases, which are precisely specified components through gas manufacturing. This approach is expected to raise the reliability of quantifying QMS data, contributing to an advance in plasma database development.

Keywords: Quadrupole mass spectrometry, Plasma, Plasma diagnostics, Standard gas

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