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Review Paper

Applied Science and Convergence Technology 2022; 31(2): 40-45

Published online March 30, 2022


Copyright © The Korean Vacuum Society.

Micro-Electromechanical Systems-based Sensors and Their Applications

Sophia Nazira , b and Oh Seok Kwona , b , *

aInfectious Disease Research Center, Korea Research Institute of Bioscience and Biotechnology (KRIBB), Daejeon 34141, Republic of Korea
bNanobiotechnology and Bioinformatics (Major), University of Science & Technology (UST), Daejeon 34141, Republic of Korea

Correspondence to:E-mail: oskwon79@kribb.re.kr

Received: December 24, 2021; Revised: February 6, 2022; Accepted: February 7, 2022

This is an Open Access article distributed under the terms of the Creative Commons Attribution Non-Commercial License(http://creativecommons.org/licenses/by-nc/3.0) which permits unrestricted non-commercial use, distribution, and reproduction in any medium, provided the original work is properly cited.


For the past 20 years, microelectromechanical system (MEMS)-based sensors have been used as small, inexpensive sensors in manufacturing. A sensing device is a platform that monitors various physical or chemical signals between target molecules and transistors; then, these signal variations are achieved by an analyzing device with numerical or analog formats. MEMS sensors are highly practical for miniaturization due to their small dimensions, low energy consumption, high performance, and compatibility with batch fabrication. Medical societies and scientists have recently switched to adopting cost-effective and small-size biosensors to monitor and control the biological system, test food and water contaminants, detect different diseases, and more. Medical researchers seek a secure and low-cost method of conducting research, maintaining public surveillance, and offering patients with specialized health care facilities. Biosensors can be used to solve this problem quickly and easily. MEMS-based sensing technology is essential for a wide range of low-cost and improved-form-factors medical equipment. In this review, we provide an overview of recent developments in sensing mechanisms that can benefit MEMS sensors, with a focus on applications in the healthcare industry and their significant benefits in the medical field.

Keywords: CRISPR, Fabrication, Graphene field-effect transistor, Microelectromechanical system, Sensor

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