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Review Paper

Applied Science and Convergence Technology 2022; 31(3): 63-70

Published online May 30, 2022


Copyright © The Korean Vacuum Society.

Recent Advances in the Low-Temperature Chemical Vapor Deposition Growth of Graphene

Mukkath Joseph Joslinea , Eui-Tae Kimb , ∗ , and Jae-Hyun Leea , ∗

aDepartment of Energy Systems and Department of Materials Science and Engineering, Ajou University, Suwon 16499, Republic of Korea
bDepartment of Materials Science and Engineering, Chungnam National University, Daejeon 34134, Republic of Korea

Correspondence to:etkim@cnu.ac.kr; jaehyunlee@ajou.ac.kr

Received: March 26, 2022; Revised: May 11, 2022; Accepted: May 17, 2022

This is an Open Access article distributed under the terms of the Creative Commons Attribution Non-Commercial License(http://creativecommons.org/licenses/by-nc/3.0) which permits unrestricted non-commercial use, distribution, and reproduction in any medium, provided the original work is properly cited.


Since the realization of the prospect of synthesizing graphene via mechanical exfoliation, graphene has garnered considerable attention owing to its remarkable chemical, electrical, material, and various other properties, which makes it an ideal contender for electronic and optoelectronic applications. Many top-down and bottom-up strategies have been researched to fabricate graphene films, notably chemical vapor deposition (CVD), which has been proven to deliver large-area, high-quality graphene films with the additional advantage of being economical. However, graphene production utilizing gaseous predecessors, such as methane, typically requires high temperatures, which increases the production cost due to the high thermal budget. Recently, the prospect of employing low-temperature conditions for graphene growth has been explored, using various hydrocarbon precursors and alternative energy sources. This review discusses the low-temperature CVD growth of graphene and recent improvements in this area with a brief introduction to applications based on these graphene specimens.

Keywords: Graphene, Chemical vapor deposition, Low-temperature growth, Electronic, Optoelectronic applications

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