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Research Paper

Applied Science and Convergence Technology 2022; 31(5): 103-106

Published online September 30, 2022


Copyright © The Korean Vacuum Society.

Safety of Chamber Exterior Wall Ground

Ye-Bin Youa , Si-Jun Kima , Young-Seok Leea , Chul-Hee Choa , In-Ho Seonga , Won-Nyoung Jeonga , Min-Su Choia , Byoung-Yeop Choia , and Shin-Jae Youa , b , ∗

aDepartment of Physics, Chungnam National University, Daejeon 34134, Republic of Korea
bInstitute of Quantum Systems (IQS), Chungnam National University, Daejeon 34134, Republic of Korea

Correspondence to:sjyou@cnu.ac.kr

Received: August 12, 2022; Revised: September 27, 2022; Accepted: September 28, 2022


Typically, the exterior wall of a chamber is grounded for safety reasons when experimenting with radio frequency (RF) power. However, RF current does not flow in a closed loop connected to the ground line on the exterior wall of the chamber because it flows in a path with a small area. Furthermore, if magnetic gradient fields are present around the chamber, they may affect whether the chamber ground is present. Because magnetic gradient fields may be generated by peripheral equipment in a typical experimental environment, analyzing the effect of the chamber ground on peripheral equipment is crucial. However, the study on the effect of chamber grounding on the time variation of peripheral magnetic fields remains open. Through simulations, this study confirms that the RF current does not flow along the ground line, even if the exterior wall of the chamber is grounded. Moreover, safety according to the presence or absence of exterior wall grounding of the chamber is discussed when a magnetic gradient field is generated.

Keywords: Chamber ground, Peripheral magnetic gradient field, Simulation, Safety, Radio frequency current

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