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Review Paper

Applied Science and Convergence Technology 2022; 31(6): 128-132

Published online November 30, 2022


Copyright © The Korean Vacuum Society.

Thin Film Characterization via Synchrotron X-ray Experiments: XRR-TXRF, GIWAXS, 3D RSM

In Hwa Cho and Hyo Jung Kim*

Department of Organic Material Science and Engineering, School of Chemical Engineering, Pusan National University, Busan 46241, Republic of Korea

Correspondence to:hyojkim@pusan.ac.kr

Received: November 2, 2022; Accepted: November 14, 2022


X-ray is an essential probe for observing, from the nano to atomic scale, the physical and chemical properties of thin films, such as film thickness, electron densities, and features related to crystal structures. In particular, bright and collimated synchrotron (SR) X-rays have enabled various in situ experiments combined with multiple measurements of X-rays and other probes. In this report, we provide basic information on SR-related X-ray experiments, such as X-ray reflectivity-Total reflection X-ray fluorescence, Grazing incidence wide-angle X-ray scattering, and 3-dimensional reciprocal space mapping, for thin film research.

Keywords: Thin film, Synchrotron X-rays, X-ray scattering, X-ray fluorescence

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