Applied Science and Convergence Technology 2023; 32(5): 118-121
Published online September 30, 2023
Copyright © The Korean Vacuum Society.
aSemiconductor Integrated Metrology Team, Korea Research Institute of Standards and Science, Daejeon 34113, Republic of Korea
bDepartment of Physics, Chungnam National University, Daejeon 34134, Republic of Korea
cSchool of Electronics and Information Engineering, Korea Aerospace University, Goyang 10540, Republic of Korea
dDepartment of Semiconductor Science, Engineering and Technology, Korea Aerospace University, Goyang 10540, Republic of Korea
This is an Open Access article distributed under the terms of the Creative Commons Attribution Non-Commercial License (https://creativecommons.org/licenses/by-nc-nd/4.0/) which permits non-commercial use, distribution and reproduction in any medium without alteration, provided that the original work is properly cited.
As a radio frequency (RF) power and plasma process monitoring sensor, a voltage current (VI) probe has been utilized and developed to monitor and optimize plasma processes in semiconductor fabrication. However, many components are needed to deliver the RF power from the power supply to the plasma electrodes such as an RF connector and RF cable which affect the RF power transmission efficiency. Therefore, it is necessary to analyze the characteristics of RF power transmission lines with respect to the external parameter configuration using a VI probe. In this study, we investigated the characteristics of RF signals using a VI probe for various RF power transmission lines, including the VI probe installation position, RF connector type, and RF cable length. The RF signals were measured as a function of the input power in a low-pressure argon discharge. Consequently, the RF power loss was significant when long RF cables were used for the transmission line. Analyzing the characteristics of RF transmission lines using a VI probe can improve the reliability of RF measurement properties for plasma processing applications.
Keywords: Voltage current probe, Radio frequency power transmission line