Applied Science and Convergence Technology 2023; 32(5): 127-133
Published online September 30, 2023
Copyright © The Korean Vacuum Society.
aApplied Physics lab for PLasma Engineering (APPLE), Department of Physics, Chungnam National University, Daejeon 34134, Republic of Korea
bInstitute of Quantum Systems (IQS), Chungnam National University, Daejeon 34134, Republic of Korea
This is an Open Access article distributed under the terms of the Creative Commons Attribution Non-Commercial License (https://creativecommons.org/licenses/by-nc-nd/4.0/) which permits non-commercial use, distribution and reproduction in any medium without alteration, provided that the original work is properly cited.
Plasma diagnostics, especially electron density measurements, have attracted much attention as it promotes an understanding of plasma and its applications. In this study, a parallel double-curling probe, which consists of two individual curling slot antennae and one microwave input/output port, is demonstrated for multisite electron density measurements using three-dimensional electromagnetic wave simulations. We verify its step-by-step operation, including the demonstration of a single curling probe, double-curling probe, and parallel double-curling probe. For the single curling probe, we introduce a curling probe operation, while for the double-curling probe, we verify the operation of two curling probes with a single microwave input/output port. With respect to the parallel double-curling probe, simulation results indicate that it can measure the multi-site electron density above its individual curling-slot antenna. This study is applicable for the parallelization and multiplication of curling probes in the development of plasma uniformity sensors.
Keywords: Plasma diagnostics, Electron density measurement, Multi-site electron density measurement, Curling probe, Double-curling probe, Parallel double-curling probe, three-dimensional electromagnetic wave simulations