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Research Paper

Applied Science and Convergence Technology 2024; 33(1): 18-22

Published online January 30, 2024

https://doi.org/10.5757/ASCT.2024.33.1.18

Copyright © The Korean Vacuum Society.

Uniformity and Thickness Control of MoS2 During Thermolysis

Gyeong Ryul Lee , Cheolho Yang , and Roy Byung Kyu Chung

School of Materials Science and Engineering, Kyungpook National University, Daegu 41566, Republic of Korea

Correspondence to:roy.b.chung@knu.ac.kr

Received: November 15, 2023; Revised: December 25, 2023; Accepted: December 25, 2023

This is an Open Access article distributed under the terms of the Creative Commons Attribution Non-Commercial License (https://creativecommons.org/licenses/by-nc-nd/4.0/) which permits non-commercial use, distribution and reproduction in any medium without alteration, provided that the original work is properly cited.

Abstract

A solution-based thermolysis route for MoS2 synthesis was systematically investigated to identify the key process parameters for achieving scalable and high-quality two-dimensional MoS2 with a uniform thickness. MoS2 was synthesized by spin coating a solution containing (NH4)2MoS4 as the precursor. The crystallinity was found to be closely related to the process temperature, while the thickness exhibited a stronger dependence on the precursor solution concentration than the other process variables. However, controlling the thickness of MoS2 is strongly dependent on the solvent properties, such as viscosity. The thickness uniformity and surface coverage could be enhanced by adding ethanolamine to a mixture of N-dimethylformamide and n-butylamine, which hindered the formation of MoS42− clusters in the precursor and facilitated the synthesis of uniform thin films. With an appropriate solvent, the MoS2 thickness can be controlled more precisely by varying the precursor concentration.

Keywords: MoS2, Thermolysis, Large scale, Uniformity

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