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Applied Science and Convergence Technology 2024; 33(4): 80-82
Published online July 30, 2024
https://doi.org/10.5757/ASCT.2024.33.4.80
Copyright © The Korean Vacuum Society.
Computational Study of the Electrical Conductivity of the Antenna on the Transmission Spectra of the Flat Cutoff Sensor
Gwang-Seok Chaea , b 
, Hee-Jung Yeomb , Jung-Hyung Kimb , ∗ , and Hyo-Chang Leea , c , ∗
aDepartment of Semiconductor Science, Engineering and Technology, Korea Aerospace University, Goyang 10540, Republic of Korea
bSemiconductor and Display Metrology Group, Korea Research Institute of Standards and Science, Daejeon 34113, Republic of Korea
cSchool of Electronics and Information Engineering, Korea Aerospace University, Goyang 10540, Republic of Korea
Correspondence to:jhkim86@kriss.re.kr, plasma@kau.ac.kr
This is an Open Access article distributed under the terms of the Creative Commons Attribution Non-Commercial License (https://creativecommons.org/licenses/by-nc-nd/4.0/) which permits non-commercial use, distribution and reproduction in any medium without alteration, provided that the original work is properly cited.
With the increase in the importance of process analysis based on the measurement of plasma parameters, there is a growing interest in non-invasive plasma diagnostic methods. The flat cutoff sensor provides non-invasive, non-perturbative, and real-time measurement of plasma parameters. However, there is a lack of research on the measurement of transmission spectrum and electron density by altering the materials of the components of the flat cutoff sensor. In this study, the characteristics of the transmission spectrum and electron density measurement of a flat cutoff sensor were analyzed by changing the electrical conductivity of the antenna during a simulation. The electrical conductivity of the antenna varied from 0.1 to 1 × 106 S/m, the cutoff frequency corresponding to electrical conductivity was the same as the input plasma frequency, and the intensity of the minimum transmission spectrum decreased from −109 to −206 dB when the electrical conductivity of the antenna decreased from 1 × 106 to 0.1 S/m. The measurement characteristics were verified by examining how the intensity of the minimum transmission spectrum varied with the conductivity of the antenna using electric field profiles and strengths. These results can help in identifying the suitable materials for the components of the flat cutoff sensor.
Keywords: Plasma diagnostic, Flat cutoff sensor, Transmission spectrum, Electrical conductivity, Non-invasive
